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Analysis and Design Principles of MEMS Devices, by Minhang Bao
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Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.
* Presents the analysis and design principles of MEMS devices more systematically than ever before.
* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures
* A problem section is included at the end of each chapter with answers provided at the end of the book.
- Sales Rank: #4102390 in Books
- Published on: 2005-06-27
- Released on: 2005-06-10
- Original language: English
- Number of items: 1
- Dimensions: 10.00" h x .75" w x 7.01" l, 1.66 pounds
- Binding: Hardcover
- 328 pages
Most helpful customer reviews
0 of 0 people found the following review helpful.
Best of Best
By S. Huang
I was in the author's class when I first knew the word MEMS. The book introduced me the analytical or mathematical part of the MEMS. Although I packed dozens of MEMS books on my shelf, this book helped me most for the design of all kinds of MEMS devices during my master study, PHD research and now work projects. It is the best of the best.
0 of 0 people found the following review helpful.
One of the best books in MEMS device design
By Zhengzheng Wu
One of the best books in MEMS device design. The author gives in-depth treatment on principles of MEMS devices. The contents offer readers very good understanding on MEMS devices, which cannot be obtained by using FEM tools . I find the book as a good text book as well as a good reference during my research and work.
0 of 0 people found the following review helpful.
For the maths oriented
By Alok Govil
This is the best book around on MEMS for those who are looking for the analytical solutions to electro-mechanical physics of MEMS devices.
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